Semiconductor wastewater treatment is a critical challenge in microelectronics manufacturing, where two main streams—organic wastewater and CMP wastewater—require distinct membrane-based solutions.
With the rapid development of artificial intelligence (AI), smart vehicles, the Internet of Things (IoT) and 5G technologies, demand for semiconductors continues to grow. Leveraging market advantages and policy support, China’s domestic semiconductor industry is accelerating its progress, with a continued focus on advancing high-end chip technologies during the 15th Five-Year Plan period.
Our products are applicable to sectors including semiconductors, LCD panels, photovoltaic new energy and more, demonstrating comprehensive membrane technology innovation capabilities.
1、Organic and CMP Wastewater in Semiconductor Wastewater Treatment
In microelectronics manufacturing, two typical types of wastewater are generated: organic wastewater and CMP wastewater.Organic wastewater in semiconductor wastewater treatment contains a wide range of organic contaminants, including alcohols, esters and photoresists, resulting in high chemical oxygen demand (COD).
CMP wastewater is another major component of semiconductor wastewater treatment generated during chemical mechanical polishing (CMP) and other wafer polishing processes. It contains large amounts of fine abrasive particles, metal debris and extremely high levels of suspended solids.The compositions of these two types of wastewater differ significantly, so their treatment strategies also have distinct priorities.
Typical Case 1
SHUIYI SiFLUID consistently adheres to technology leadership and innovation-driven development, remaining committed to advancing membrane-based water treatment solutions.
Developed in-house, the SHUIYI SiFLUID IMR series MBR membranes combine inner-reinforced PVDF material with patented pulsed aeration technology to deliver three core advantages: lower operating costs, stable performance and improved energy efficiency.
The SHUIYI SiFLUID ICR Series RO membranes for water reuse incorporate anti-fouling technology, offering excellent fouling resistance and ease of cleaning. They deliver superior salt rejection performance and reliable performance under complex water qualities wile reducing operation and maintenance costs. From compliant wastewater treatment and water reuse to near-zero liquid discharge solutions, SHUIYI provides comprehensive membrane technologies to support green industrial development.
2、Ultrapure Water as the Final Goal of Semiconductor Wastewater Treatment
Ultrapure water is water that has been purified to the highest degree, consisting solely of hydrogen and oxygen, with virtually no particles, ions, organic compounds, microorganisms or other impurities. It is widely used in high-tech manufacturing industries such as semiconductors and microelectronics, where production processes require exceptionally high water quality. It is an indispensable specialty water in these industries. Ultrapure water production is the complementary goal of semiconductor wastewater treatment, ensuring closed-loop water management.
The choice of membrane technology directly impacts the efficiency and cost of semiconductor wastewater treatment. For instance, MBR membranes with inner-reinforced PVDF offer higher mechanical strength and longer service life, reducing replacement frequency. Meanwhile, advanced RO membranes with anti-fouling properties can handle high-salinity streams, enabling water reuse rates. Exclusive patented hydrophilic modification technology ensures high surface porosity and uniform pore size distribution in membrane fibers, delivering superior anti-fouling performance. This reduces cleaning frequency and enhances operational efficiency.
Typical Case 2
As semiconductor manufacturing process continues to advance toward higher precision, the industry imposes increasingly stringent requirements on key water quality parameters such as conductivity, particle content and total organic carbon(TOC).
The entire ultrapure water production solution can employ SHUIYI SiFLUID IUF series pure-water UF membranes, followed by a two-pass SiFLUID ISC series pure-water RO membranes for pre-desalination. Combined with EDI and a polishing mixed bed process, the system consistently produces high-quality ultrapure water that meets the stringent standards.
